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NOVELLUSPlate, EMO , 80*65*5mm
NOVELLUSPlate, Fork Retainer, Bottom, CERAMIC
NOVELLUSPlate, Fork Retainer, Bottom, METAL , 240*240*8mm
NOVELLUSPlate, Gas Distribution, Bottom , 380*380*150mm
NOVELLUSPlate, Gas Distribution, Top , 200*200*60mm
NOVELLUSPlate, Gas Line Cover
NOVELLUSPlate, Gas Lines Cover
NOVELLUSPlate, Grounding, 0.03, Strain Rel , 35*35*5mm ,
NOVELLUSPlate, Inlet Lower, Gas Box , 175*55*5mm
NOVELLUSPlate, Inlet Upper, Gas Box , 175*70*3mm
NOVELLUSPlate, Loadlock, SMC Gate Valve
NOVELLUSPlate, Mount, I/O Controller , 320*115*100mm
NOVELLUSPlate, Mounting, Hastings Gauge , 180*155*20mm ,
NOVELLUSPlate, Mounting, RF Feedthru , 155*155*25mm ,
NOVELLUSPlate, Mtg, Actuator
